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Rapid Thermal Processing of Semiconductors
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Rapid Thermal Processing of Semiconductors in Chattanooga, TN
By Barnes & Noble
Current price: $249.99
Barnes and Noble
Rapid Thermal Processing of Semiconductors in Chattanooga, TN
By Barnes & Noble
Current price: $249.99
Loading Inventory...
Size: Hardcover
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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