This book presents an in-depth exploration of cantilever array sensors, specifically designed for the detection and classification of volatile organic compounds (VOCs). Combining cutting-edge research with practical applications, it covers the design principles, fabrication processes, and performance analysis of cantilever arrays in VOC sensing. Aimed at researchers, professionals, and students in the fields of MEMS, sensor technology, and environmental monitoring, this comprehensive guide delves into the scientific and engineering aspects of cantilever-based sensor technology. Detailed experimental procedures and real-world case studies provide readers with the tools to understand and implement advanced sensor systems for chemical detection. Whether you're advancing your knowledge in micro-sensors or exploring novel approaches to VOC detection, this book offers valuable insights and practical guidance for innovators and engineers alike.